JPH0444595Y2 - - Google Patents
Info
- Publication number
- JPH0444595Y2 JPH0444595Y2 JP14876987U JP14876987U JPH0444595Y2 JP H0444595 Y2 JPH0444595 Y2 JP H0444595Y2 JP 14876987 U JP14876987 U JP 14876987U JP 14876987 U JP14876987 U JP 14876987U JP H0444595 Y2 JPH0444595 Y2 JP H0444595Y2
- Authority
- JP
- Japan
- Prior art keywords
- silicon oxide
- temperature
- section
- oxide film
- treatment liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 71
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 29
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 238000007654 immersion Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000007864 aqueous solution Substances 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 29
- 239000000463 material Substances 0.000 description 7
- 230000005855 radiation Effects 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 238000007598 dipping method Methods 0.000 description 5
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 4
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 4
- 239000004327 boric acid Substances 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- LRCFXGAMWKDGLA-UHFFFAOYSA-N dioxosilane;hydrate Chemical compound O.O=[Si]=O LRCFXGAMWKDGLA-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
- Silicon Compounds (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14876987U JPH0444595Y2 (en]) | 1987-09-28 | 1987-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14876987U JPH0444595Y2 (en]) | 1987-09-28 | 1987-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6453721U JPS6453721U (en]) | 1989-04-03 |
| JPH0444595Y2 true JPH0444595Y2 (en]) | 1992-10-21 |
Family
ID=31420388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14876987U Expired JPH0444595Y2 (en]) | 1987-09-28 | 1987-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444595Y2 (en]) |
-
1987
- 1987-09-28 JP JP14876987U patent/JPH0444595Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6453721U (en]) | 1989-04-03 |
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